A Wireless Sequentially Actuated Microvalve System
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Remotely adjustable check-valves with an electrochemical
The microvalve array is fabricated using standard microelec-tromechanical system (MEMS) processes including chemi-cal vapor deposition, lift-off, reactive ion etching and SU-8 photolithography. Figure 3 shows the fabrication process. It starts with silicon wafers with a 2 µm low-pressure chemical
A wireless sequentially actuated microvalve system
May 30, 2019 A wireless sequentially actuated microvalve system Seung-Ki Baek1, Yong-Kyu Yoon2, Hye-Seon Jeon1, Soonmin Seo1 and Jung-Hwan Park1,3 1 Department of BioNano Technology and Gachon BioNano Research Institute, Gachon University, Seongnam, Gyeonggi-Do 461-701, Korea 2 Department of Electrical and Computer Engineering, University of Florida
A wireless actuating drug delivery system
May 14, 2019 A wireless sequentially actuated microvalve system Seung-Ki Baek, Yong-Kyu Yoon, Hye-Seon Jeon et al.-A pulsed mode electrolytic drug delivery device Ying Yi, Ulrich Buttner, Armando A A Carreno et al.-A flat and cost effective actuator based on superabsorbent polymer driving a skin attachable drug delivery system Michael Vosseler, Markus